Thin Film Materials Technology: Sputtering of Compound Materials

Thin Film Materials Technology: Sputtering of Compound MaterialsAuthor: Kiyotaka Wasa et al
Category: Diffusion & Thin Films
Audience: Scientists, engineers, graduate students in the fields of semiconductors, thin films, energy, environment, automotive, medical and food packaging.

Inhalt (PDF)

Language: en
Copyright: 2004
Specifications: Seiten: 432
6 x 9, Hardcover
ISBN: 0-8155-1483-2

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.

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  • Principles and examples of making thin-film materials and devices such as nanometer composite thin films, nanometer superlattice of compound ceramics, micro-sensors and actuators, micro-MEMS, mobile compact/flexible ferroelectric memory, flat display including plasma display and PLD, and thin film catalysis, solar battery, and large-area functional window glass coatings for energy and environmental uses.
  • Covers techniques in automotive parts coatings; non-peel plastics coatings with metal, alloy, and compound films.
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